EMI Astex ECR CVD Deposition Plasma Source ECR3UW, EMS 40-25-1D-10T, LS
EMI Astex ECR CVD Deposition Plasma Source ECR3UW, EMS 40-25-1D-10T, LSEMI Astex ECR CVD Deposition Plasma Source ECR3UW, EMS 40-25-1D-10T, LSEMI Astex ECR CVD Deposition Plasma Source ECR3UW, EMS 40-25-1D-10T, LSEMI Astex ECR CVD Deposition Plasma Source ECR3UW, EMS 40-25-1D-10T, LSEMI Astex ECR CVD Deposition Plasma Source ECR3UW, EMS 40-25-1D-10T, LSEMI Astex ECR CVD Deposition Plasma Source ECR3UW, EMS 40-25-1D-10T, LSEMI Astex ECR CVD Deposition Plasma Source ECR3UW, EMS 40-25-1D-10T, LSEMI Astex ECR CVD Deposition Plasma Source ECR3UW, EMS 40-25-1D-10T, LSEMI Astex ECR CVD Deposition Plasma Source ECR3UW, EMS 40-25-1D-10T, LSEMI Astex ECR CVD Deposition Plasma Source ECR3UW, EMS 40-25-1D-10T, LSEMI Astex ECR CVD Deposition Plasma Source ECR3UW, EMS 40-25-1D-10T, LSEMI Astex ECR CVD Deposition Plasma Source ECR3UW, EMS 40-25-1D-10T, LS
$3,250.00
Used but clean and in good condition. This was removed from a semi functional PlasmaQuest Deposition system (The control system boards were malfunctioning and replacements were not available).

The ECR P/S powers up and appears functional. The Astex EMS is clean and in great shape. The Astex LS was not attached to the PlasmaQuest system when we received it and appears to be close to new. Sadly, the Microwave Generator was not with the system.

The Plasma Dome is attached to a 10" conflat flange (CF200). The dome is solid and in good condition, though no longer totally clear, as shown. The flange itself is clean on the plasma source side. The other side has some oxidation as shown.

This system comes with exactly what is described and shown in photos, including:
  • Astex ECR3UW Plasma Source
  • Astex Model LS
  • Electronic Measurements ECR Power Supply (EMS 40-25-1D-10T)
  • Plasma Dome w/ CF200 8" Conflat Flange
  • Mounting hardware for conflat and Plasma Source

For any questions, please contact us before purchasing.