Very clean and in beautiful condition as shown in the photographs. This controller and valve set for C5F8 Gas came from a TEL Tokyo Electron T-3044SS Etcher system that we are parting out. The system came out of a class 100 clean room, nanofabrication facility and was crate-stored in working condition before being released as surplus.
The Fujikin FCS line specifically uses a pressure-based sonic/choked flow design (critical expansion condition) combined with a highly precise piezo actuator control valve. It’s highly immune to upstream pressure spikes and crosstalk across gas blocks.
All Fujikin parts have been sealed since removal and will stay sealed during storage and shipment.
Hassle-Free Warranty.
Product Description
The Fujikin FCS-4WS-F65A is a high-accuracy, ultra-high purity (UHP) Flow Control System (FCS) engineered explicitly for critical gas delivery manifolds within advanced semiconductor etching systems. Utilizing an advanced pressure-based sonic/choked flow architecture, the FCS series ensures extreme setpoint stability and flow precision, making it entirely immune to downstream pressure fluctuations or manifold cross-talk. This specific model is factory-configured for Octafluorocyclopentene (C5F8) gas chemistry. To safely and reliably manage this critical dielectric etchant, the unit incorporates an ultra-fast piezo-actuated control valve, an integrated high-precision pressure sensor, and high-purity metal seals to ensure leak-free performance.
Surplus Condition Note: This mass flow controller was carefully extracted from an active Tokyo Electron (TEL) etching system operated exclusively within a high-classification, ultra-clean semiconductor cleanroom. The item is in pristine cosmetic condition, completely unblemished, and free from typical industrial residues or film.
Technical Specifications
- Model Number: FCS-4WS-F65A
- Manufacturer: Fujikin Incorporated (Japan)
- Core Architecture: Sonic/Choked Flow Control System (Pressure-Based)
- Gas Calibration: C5F8 (Octafluorocyclopentene Dielectric Etch Gas)
- Valve Control Technology: High-speed, high-precision Piezoelectric actuator valve
- Sealing Specification: High-purity gas-tight metal seal architecture
- Mounting Interface: Integrated Gas System (IGS) Surface Mount footprint
- Application History: Sourced directly from a pristine cleanroom Tokyo Electron process tool manifold assembly
