Very clean and in beautiful condition as shown in the photographs. This gauge was used with C5F8 Gas in a TEL Tokyo Electron T-3044SS Etcher system that we are parting out. The system came out of a class 100 clean room, nanofabrication facility and was crate-stored in working condition before being released to us.
For high-volume, ultra-pure semiconductor or laboratory gas distribution manifolds, the 316L-P composition is top-tier. The "P" designation means the passivated, electropolished inner surfaces that are designed to minimize particle generation and keep the fluid path completely inert.
All Fujikin parts have been sealed since removal and will stay sealed during storage and shipment.
Hassle-Free Warranty.
Product Description
The Nagano Keiki GW20-D23-6 is an ultra-high purity (UHP) compound pressure gauge engineered specifically for critical gas delivery and monitoring lines within semiconductor manufacturing environments. As part of Nagano Keiki's premier GW20 series, this gauge features an EP (electropolished) internal fluid path and is assembled under strict cleanroom conditions to completely eliminate particle contamination and outgassing. Designed as a compound monitoring instrument, it accurately tracks fluid pressures across both full vacuum (-0.1 MPa) and positive pressure (up to 0.4 MPa) domains. This capabilities makes it an essential asset for process lines subject to regular vacuum-purge cycles, ensuring absolute system integrity and precise process line diagnostics.
Surplus Condition Note: This pressure gauge was carefully extracted from a working Tokyo Electron (TEL) etching tool operated exclusively within a high-classification, ultra-clean semiconductor cleanroom. Because it was utilized on an ultra-pure, dry fluorocarbon ($C_5F_8$) process line, the internal metallurgy is free from aggressive chemical scaling, particulate buildup, or moisture degradation. The face glass and casing are cosmetically pristine.
Technical Specifications
- Model Number: GW20-D23-6
- Manufacturer: Nagano Keiki Co., Ltd. (Japan)
- Product Classification: GW20 Series Ultra-High Purity (UHP) Mechanical Pressure Gauge
- Pressure Scale Range: Compound Scale (-0.1 to 0.4 MPa)
- Internal Metallurgy: High-grade, electropolished stainless steel wetted parts for maximum chemical resistance and zero particle shed
- Dial Face Design: High-visibility white dial with dual zone indicators (Vacuum/Positive Pressure markings)
- Application Lineage: Sourced natively from a cleanroom Tokyo Electron semiconductor gas panel manifold assembly
