Very clean and in beautiful condition as shown in the photographs. This valve was used with C5F8 Gas in a TEL Tokyo Electron T-3044SS Etcher system that we are parting out. The system came out of a class 100 clean room, nanofabrication facility and was crate-stored in working condition before being released to us.
For high-volume, ultra-pure semiconductor or laboratory gas distribution manifolds, the 316L-P composition is top-tier. The "P" designation means the passivated, electropolished inner surfaces that are designed to minimize particle generation and keep the fluid path completely inert.
All Fujikin parts have been sealed since removal and will stay sealed during storage and shipment.
Hassle-Free Warranty.
Product Description
The Fujikin 053801 is an ultra-high purity (UHP) pneumatic process valve engineered for critical gas distribution networks within semiconductor manufacturing tools. This high-performance valve features a Normally Closed (N.C.) default configuration and relies on an advanced, ultra-clean diaphragm seal architecture designed to minimize internal dead volume and particle generation. Pre-mounted to a precision-engineered 316L-P electropolished stainless steel manifold block, this surface-mount Integrated Gas System (IGS) assembly ensures completely inert, leak-free isolation of volatile, corrosive, or ultra-pure process gases.
Surplus Condition Note: This assembly was carefully reclaimed from a working Tokyo Electron (TEL) etching system operated exclusively within a high-classification, pristine semiconductor cleanroom. The item is cosmetically immaculate, free from typical industrial residues, and the sealing interfaces are pristine.
Technical Specifications
- Model Number: 053801
- Manufacturer: Fujikin Incorporated (Japan)
- Actuation Type: Pneumatic / Air Operated
- Default State: Normally Closed (N.C.)
- Manifold Composition: 316L-P Stainless Steel (Premium Electropolished and Passivated Inner Fluid Path)
- Mounting Configuration: Modular Surface Mount / Integrated Gas System (IGS) Footprint
- Actuation Pressure Range: 0.39 to 0.59 MPa (approx. 56.5 to 85.5 PSI)
- Application History: Sourced directly from a Tokyo Electron semiconductor processing tools footprint
