Very clean and in beautiful condition as shown in the photographs. This controller and valve set for C5F8 Gas came from a TEL Tokyo Electron T-3044SS Etcher system that we are parting out. The system came out of a class 100 clean room, nanofabrication facility and was crate-stored in working condition before being released as surplus.
The Fujikin FCS line specifically uses a pressure-based sonic/choked flow design (critical expansion condition) combined with a highly precise piezo actuator control valve. It’s highly immune to upstream pressure spikes and crosstalk across gas blocks.
All Fujikin parts have been sealed since removal and will stay sealed during storage and shipment.
Hassle-Free Warranty.
Product Description
The Fujikin FCS-4WS-F115A is a high-performance, ultra-precise mass flow control system designed explicitly for critical semiconductor wafer manufacturing processes, such as etch and deposition. Unlike conventional thermal mass flow controllers, the FCS series utilizes an advanced pressure-based design relying on sonic/choked flow conditions (critical expansion). This allows the device to achieve exceptional flow control accuracy and extreme stability, making it completely immune to upstream gas supply pressure fluctuations and manifold crosstalk. Featuring an ultra-fast piezo-actuated control valve, an integrated high-precision pressure sensor, and high-purity metal seals, this unit ensures repeatable, ultra-clean gas delivery without the need for dedicated upstream regulators.
Surplus Condition Note: This unit was carefully extracted from a working Tokyo Electron (TEL) etching system operated exclusively inside a pristine, high-classification semiconductor cleanroom environment. The exterior and gas paths are visually immaculate and free from typical industrial wear.
Technical Specifications
- Model Number: FCS-4WS-F115A (FCS-4WS-F115A#B)
- Manufacturer: Fujikin Incorporated (Japan)
- Device Type: Sonic/Choked Flow Control System (Pressure-Based MFC)
- Valve Architecture: High-speed, high-precision Piezo control valve
- Seal Type: High-purity metal seal architecture for ultra-low leak rates and high chemical compatibility
- Mounting Interface: Integrated Gas System (IGS) surface-mount standard (typically W-Seal / 1.125-inch type)
- Response Time: Less than or equal to 0.5 seconds for rapid setpoint tracking
- Application History: Sourced from an intact Tokyo Electron semiconductor etching tool
